Issued Patents All Time
Showing 26–32 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6957749 | Liquid delivery system | Younes Achkire, Brian J. Brown | 2005-10-25 |
| 6645303 | Heater/lift assembly for high temperature processing chamber | Hari Ponnekanti, Inna Shmurun, Visweswaren Sivaramakrishnan | 2003-11-11 |
| 6464799 | Method for managing a fluid level associated with a substrate processing tank | Alexander Lerner, Brian J. Brown, Boris Fishkin | 2002-10-15 |
| 6444037 | Chamber liner for high temperature processing chamber | Visweswaren Sivaramakrishnan | 2002-09-03 |
| 6106630 | Ceramic-coated heating assembly for high temperature processing chamber | — | 2000-08-22 |
| 6019848 | Lid assembly for high temperature processing chamber | Inna Shmurun, Visweswaren Sivaramakrishnan, Eugene Fukshansky | 2000-02-01 |
| 5968587 | Systems and methods for controlling the temperature of a vapor deposition apparatus | — | 1999-10-19 |