Issued Patents All Time
Showing 176–178 of 178 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5862057 | Method and apparatus for tuning a process recipe to target dopant concentrations in a doped layer | Li-Qun Xia | 1999-01-19 |
| 5812403 | Methods and apparatus for cleaning surfaces in a substrate processing system | Gary Fong, Li-Qun Xia, Srinivas D. Nemani | 1998-09-22 |
| 5356722 | Method for depositing ozone/TEOS silicon oxide films of reduced surface sensitivity | Bang Nguyen, Maria Galiano | 1994-10-18 |