| 9023723 |
Method of fabricating a gate-all-around word line for a vertical channel DRAM |
Er-Xuan Ping, Judon Tony Pan |
2015-05-05 |
| 8895432 |
Method of fabricating a self-aligned buried bit line for a vertical channel DRAM |
Bingxi Wood, Er-Xuan Ping |
2014-11-25 |
| 8293460 |
Double exposure patterning with carbonaceous hardmask |
Hui-Wan Chen, Yongmei Chen, Huixiong Dai, Jiahua Yu, Susie Xiuru Yang +7 more |
2012-10-23 |
| 7892911 |
Metal gate electrodes for replacement gate integration scheme |
Bingxi Wood |
2011-02-22 |
| 7547621 |
LPCVD gate hard mask |
Rajesh Kanuri, Christopher Dennis Bencher, Hoiman Raymond Hung |
2009-06-16 |
| 6566224 |
Process for device fabrication |
Chien-Shing Pai |
2003-05-20 |
| 6469390 |
Device comprising thermally stable, low dielectric constant material |
Kin P. Cheung, Chien-Shing Pai, Wei Zhu |
2002-10-22 |
| 5438006 |
Method of fabricating gate stack having a reduced height |
Kuo-Hua Lee, Chun-Ting Liu, Ruichen Liu |
1995-08-01 |
| 4960656 |
Devices and process for producing devices containing silicon nitride films |
Daniel Flamm, Dale E. Ibbotson, John A. Mucha |
1990-10-02 |
