Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7741012 | Method for removal of immersion lithography medium in immersion lithography processes | Adam R. Pawloski, Amr Y. Abdo, Gilles Amblard, Bruno M. LaFontaine, Ivan Lalovic +3 more | 2010-06-22 |
| 7014966 | Method and apparatus for elimination of bubbles in immersion medium in immersion lithography systems | Adam R. Pawloski, Amr Y. Abdo, Gilles Amblard, Bruno M. LaFontaine, Ivan Lalovic +3 more | 2006-03-21 |
| 6608321 | Differential wavelength inspection system | Bruno La Fontaine, Harry J. Levinson | 2003-08-19 |