Issued Patents 2025
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12387909 | Low frequency RF generator and associated electrostatic chuck | Alexei Marakhtanov, Felix Kozakevich, Bing Ji, Ranadeep Bhowmick, John Holland | 2025-08-12 |
| 12381105 | Coolant channel with internal fins for substrate processing pedestals | Feng Wang, Darrell Ehrlich, Eric SAMULON | 2025-08-05 |
| 12340989 | Electrostatic edge ring mounting system for substrate processing | Keith Comendant, Adam Mace, Darrell Ehrlich, John Holland, Felix Kozakevich +1 more | 2025-06-24 |
| 12237201 | Electrostatic chucks with coolant gas zones and corresponding groove and monopolar electrostatic clamping electrode patterns | Keith Comendant, John Holland | 2025-02-25 |