FW

Feng Wang

Lam Research: 1 patents #163 of 468Top 35%
Overall (2025): #389,834 of 469,880Top 85%
1
Patents 2025

Issued Patents 2025

Patent #TitleCo-InventorsDate
12381105 Coolant channel with internal fins for substrate processing pedestals Alexander Matyushkin, Darrell Ehrlich, Eric SAMULON 2025-08-05