Issued Patents 2025
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12381105 | Coolant channel with internal fins for substrate processing pedestals | Feng Wang, Alexander Matyushkin, Darrell Ehrlich | 2025-08-05 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12381105 | Coolant channel with internal fins for substrate processing pedestals | Feng Wang, Alexander Matyushkin, Darrell Ehrlich | 2025-08-05 |