Issued Patents 2025
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12381105 | Coolant channel with internal fins for substrate processing pedestals | Feng Wang, Alexander Matyushkin, Eric SAMULON | 2025-08-05 |
| 12340989 | Electrostatic edge ring mounting system for substrate processing | Alexander Matyushkin, Keith Comendant, Adam Mace, John Holland, Felix Kozakevich +1 more | 2025-06-24 |