Issued Patents 2025
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12340989 | Electrostatic edge ring mounting system for substrate processing | Alexander Matyushkin, Adam Mace, Darrell Ehrlich, John Holland, Felix Kozakevich +1 more | 2025-06-24 |
| 12237201 | Electrostatic chucks with coolant gas zones and corresponding groove and monopolar electrostatic clamping electrode patterns | Alexander Matyushkin, John Holland | 2025-02-25 |