Issued Patents 2025
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12412736 | Methods and systems for managing byproduct material accumulation during plasma-based semiconductor wafer fabrication process | Leonid Belau, Alexei Marakhtanov, Eric A. Hudson | 2025-09-09 |
| 12387909 | Low frequency RF generator and associated electrostatic chuck | Alexei Marakhtanov, Felix Kozakevich, Bing Ji, Ranadeep Bhowmick, Alexander Matyushkin | 2025-08-12 |
| 12362159 | Systems and methods for controlling a plasma sheath characteristic | Alexei Marakhtanov, James Eugene Caron, Felix Kozakevich, Ranadeep Bhowmick, Bing Ji | 2025-07-15 |
| 12354840 | Systems and methods for optimizing power delivery to an electrode of a plasma chamber | Ranadeep Bhowmick, Felix Kozakevich, Bing Ji, Alexei Marakhtanov | 2025-07-08 |
| 12340989 | Electrostatic edge ring mounting system for substrate processing | Alexander Matyushkin, Keith Comendant, Adam Mace, Darrell Ehrlich, Felix Kozakevich +1 more | 2025-06-24 |
| 12315705 | Distortion of pulses for wafer biasing | Karl Leeser | 2025-05-27 |
| 12308211 | Systems and methods for use of low frequency harmonics in bias radiofrequency supply to control uniformity of plasma process results across substrate | Alexei Marakhtanov, Felix Kozakevich, Ranadeep Bhowmick | 2025-05-20 |
| 12266505 | Systems and methods for using binning to increase power during a low frequency cycle | Alexei Marakhtanov, Felix Kozakevich, Ranadeep Bhowmick, Bing Ji | 2025-04-01 |
| 12255052 | Process control for ion energy delivery using multiple generators and phase control | Ranadeep Bhowmick, Felix Kozakevich, Alexei Marakhtanov, Eric A. Hudson | 2025-03-18 |
| 12237201 | Electrostatic chucks with coolant gas zones and corresponding groove and monopolar electrostatic clamping electrode patterns | Alexander Matyushkin, Keith Comendant | 2025-02-25 |