Issued Patents 2025
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12401338 | Multiple-output radiofrequency matching module and associated methods | Sunil Kapoor, Bradford J. Lyndaker | 2025-08-26 |
| 12394601 | Impedance transformation in radio-frequency-assisted plasma generation | Eller Y. Juco, Thomas Frederick, Paul Konkola | 2025-08-19 |
| 12379720 | Common terminal heater for ceramic pedestals used in semiconductor for fabrication | — | 2025-08-05 |
| 12371781 | In situ protective coating of chamber components for semiconductor processing | Akhil Singhal, David Charles Smith | 2025-07-29 |
| 12368029 | Lamellar ceramic structure | Joel Hollingsworth, Ramkishan Rao Lingampalli | 2025-07-22 |
| 12322582 | Anomalous plasma event detection and mitigation in semiconductor processing | Sunil Kapoor, Noah Elliot Baker, Liang Meng, Yukinori Sakiyama | 2025-06-03 |
| 12322641 | Mechanical indexer for multi-station process module | Michael Nordin, Richard M. Blank, Robert Sculac, Damien Slevin | 2025-06-03 |
| 12315705 | Distortion of pulses for wafer biasing | John Holland | 2025-05-27 |
| 12308216 | Mechanical suppression of parasitic plasma in substrate processing chamber | Douglas Keil, Edward Augustyniak, Mohamed Sabri | 2025-05-20 |
| 12215989 | Differential-pressure-based flow meters | John F. Stumpf | 2025-02-04 |
| 12217939 | RF tuning systems including tuning circuits having impedances for setting and adjusting parameters of electrodes in electrostatic chucks | David French, Vincent E. Burkhart, Liang Meng | 2025-02-04 |
| 12211685 | Joining techniques for composite ceramic bodies | — | 2025-01-28 |