Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12340992 | Detection and location of anomalous plasma events in fabrication chambers | Yukinori Sakiyama, Niraj Rana | 2025-06-24 |
| 12322582 | Anomalous plasma event detection and mitigation in semiconductor processing | Sunil Kapoor, Karl Leeser, Liang Meng, Yukinori Sakiyama | 2025-06-03 |