Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12347648 | Filter box for a substrate processing system | Miguel Benjamin Vasquez | 2025-07-01 |
| 12243725 | High temperature RF connection with integral thermal choke | Timothy Scott Thomas, Vincent E. Burkhart, Joel Hollingsworth, Damien Slevin | 2025-03-04 |
| 12217939 | RF tuning systems including tuning circuits having impedances for setting and adjusting parameters of electrodes in electrostatic chucks | Vincent E. Burkhart, Karl Leeser, Liang Meng | 2025-02-04 |