Issued Patents 2025
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12412736 | Methods and systems for managing byproduct material accumulation during plasma-based semiconductor wafer fabrication process | Leonid Belau, Eric A. Hudson, John Holland | 2025-09-09 |
| 12387909 | Low frequency RF generator and associated electrostatic chuck | Felix Kozakevich, Bing Ji, Ranadeep Bhowmick, John Holland, Alexander Matyushkin | 2025-08-12 |
| 12362159 | Systems and methods for controlling a plasma sheath characteristic | James Eugene Caron, John Holland, Felix Kozakevich, Ranadeep Bhowmick, Bing Ji | 2025-07-15 |
| 12354840 | Systems and methods for optimizing power delivery to an electrode of a plasma chamber | Ranadeep Bhowmick, John Holland, Felix Kozakevich, Bing Ji | 2025-07-08 |
| 12340989 | Electrostatic edge ring mounting system for substrate processing | Alexander Matyushkin, Keith Comendant, Adam Mace, Darrell Ehrlich, John Holland +1 more | 2025-06-24 |
| 12308211 | Systems and methods for use of low frequency harmonics in bias radiofrequency supply to control uniformity of plasma process results across substrate | Felix Kozakevich, Ranadeep Bhowmick, John Holland | 2025-05-20 |
| 12266505 | Systems and methods for using binning to increase power during a low frequency cycle | Felix Kozakevich, Ranadeep Bhowmick, Bing Ji, John Holland | 2025-04-01 |
| 12255052 | Process control for ion energy delivery using multiple generators and phase control | Ranadeep Bhowmick, Felix Kozakevich, John Holland, Eric A. Hudson | 2025-03-18 |