Issued Patents 2025
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12276490 | System and method to map thickness variations of substrates in manufacturing systems | Mehdi Vaez-Iravani, Gopalakrishna B. Prabhu | 2025-04-15 |
| 12265377 | Autonomous substrate processing system | Priyadarshi Panda, Lei Lian, Pengyu Han, Prashant Aji, Eli Mor +2 more | 2025-04-01 |
| 12225808 | In-line monitoring of OLED layer thickness and dopant concentration | Yeishin Tung, Byung Sung Kwak, Robert Jan Visser, Guoheng Zhao, Dinesh Kabra +1 more | 2025-02-11 |
| 12211717 | Spatial pattern loading measurement with imaging metrology | Eric Ng, Edward W. Budiarto, Mehdi Vaez-Iravani, Venkatakaushik Voleti | 2025-01-28 |