Issued Patents 2025
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12385803 | Endpoint detection system for enhanced spectral data collection | Pengyu Han | 2025-08-12 |
| 12265377 | Autonomous substrate processing system | Priyadarshi Panda, Pengyu Han, Todd Egan, Prashant Aji, Eli Mor +2 more | 2025-04-01 |
| 12237158 | Etch feedback for control of upstream process | Priyadarshi Panda, Leonard Tedeschi | 2025-02-25 |