Issued Patents 2025
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12265377 | Autonomous substrate processing system | Priyadarshi Panda, Lei Lian, Pengyu Han, Todd Egan, Prashant Aji +2 more | 2025-04-01 |
| 12237158 | Etch feedback for control of upstream process | Priyadarshi Panda, Lei Lian | 2025-02-25 |