Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12298660 | Reflective mask blank for EUV lithography, reflective mask for EUV lithography, and method for manufacturing same | Hirotomo Kawahara, Daijiro AKAGI, Hiroaki IWAOKA, Michinori Suehara, Keishi TSUKIYAMA | 2025-05-13 |
| 12216397 | Reflective mask blank for EUV lithography, mask blank for EUV lithography, and manufacturing methods thereof | Daijiro AKAGI, Hirotomo Kawahara, Ichiro Ishikawa, Kenichi Sasaki | 2025-02-04 |
| 12216398 | Reflective mask blank and reflective mask | Hiroyoshi Tanabe, Hiroshi Hanekawa | 2025-02-04 |