Issued Patents 2025
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12346018 | Reflective mask blank, reflective mask, method of manufacturing reflective mask blank, and method of manufacturing reflective mask | Yuya Nagata, Daijiro AKAGI, Hiroaki IWAOKA | 2025-07-01 |
| 12252290 | Collecting tool | — | 2025-03-18 |
| 12235574 | Reflective mask blank, reflective mask, method of manufacturing reflective mask blank, and method of manufacturing reflective mask | Yuya Nagata, Daijiro AKAGI, Hiroaki IWAOKA | 2025-02-25 |
| 12216397 | Reflective mask blank for EUV lithography, mask blank for EUV lithography, and manufacturing methods thereof | Daijiro AKAGI, Hirotomo Kawahara, Toshiyuki Uno, Ichiro Ishikawa | 2025-02-04 |
| 12204240 | Reflective mask blank, reflective mask, method of manufacturing reflective mask blank, and method of manufacturing reflective mask | Daijiro AKAGI, Shunya TAKI, Takuma Kato, Ichiro Ishikawa | 2025-01-21 |