Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12222640 | Reflective mask blank, reflective mask, method of manufacturing reflective mask blank, and method of manufacturing reflective mask | Shunya TAKI, Hiroaki IWAOKA, Daijiro AKAGI | 2025-02-11 |
| 12216397 | Reflective mask blank for EUV lithography, mask blank for EUV lithography, and manufacturing methods thereof | Daijiro AKAGI, Hirotomo Kawahara, Toshiyuki Uno, Kenichi Sasaki | 2025-02-04 |
| 12204240 | Reflective mask blank, reflective mask, method of manufacturing reflective mask blank, and method of manufacturing reflective mask | Daijiro AKAGI, Shunya TAKI, Takuma Kato, Kenichi Sasaki | 2025-01-21 |