Issued Patents 2025
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12346018 | Reflective mask blank, reflective mask, method of manufacturing reflective mask blank, and method of manufacturing reflective mask | Yuya Nagata, Kenichi Sasaki, Hiroaki IWAOKA | 2025-07-01 |
| 12306530 | Reflective mask blank, reflective mask, method of manufacturing reflective mask blank, and method of manufacturing reflective mask | Takuma Kato, Takeshi OKATO, Ryusuke OISHI, Yusuke Ono | 2025-05-20 |
| 12298660 | Reflective mask blank for EUV lithography, reflective mask for EUV lithography, and method for manufacturing same | Hirotomo Kawahara, Hiroaki IWAOKA, Toshiyuki Uno, Michinori Suehara, Keishi TSUKIYAMA | 2025-05-13 |
| 12235574 | Reflective mask blank, reflective mask, method of manufacturing reflective mask blank, and method of manufacturing reflective mask | Yuya Nagata, Kenichi Sasaki, Hiroaki IWAOKA | 2025-02-25 |
| 12222640 | Reflective mask blank, reflective mask, method of manufacturing reflective mask blank, and method of manufacturing reflective mask | Shunya TAKI, Hiroaki IWAOKA, Ichiro Ishikawa | 2025-02-11 |
| 12216397 | Reflective mask blank for EUV lithography, mask blank for EUV lithography, and manufacturing methods thereof | Hirotomo Kawahara, Toshiyuki Uno, Ichiro Ishikawa, Kenichi Sasaki | 2025-02-04 |
| 12204240 | Reflective mask blank, reflective mask, method of manufacturing reflective mask blank, and method of manufacturing reflective mask | Shunya TAKI, Takuma Kato, Ichiro Ishikawa, Kenichi Sasaki | 2025-01-21 |