Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12298660 | Reflective mask blank for EUV lithography, reflective mask for EUV lithography, and method for manufacturing same | Hirotomo Kawahara, Daijiro AKAGI, Hiroaki IWAOKA, Toshiyuki Uno, Keishi TSUKIYAMA | 2025-05-13 |