Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12235575 | Reflective mask blank for EUV lithography and substrate with conductive film | Yusuke Ono, Hirotomo Kawahara | 2025-02-25 |
| 12216398 | Reflective mask blank and reflective mask | Hiroyoshi Tanabe, Toshiyuki Uno | 2025-02-04 |