Issued Patents 2024
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12165893 | Substrate processing system and transfer method | Masatomo KITA, Toshiyuki MAKABE, Shin Matsuura, Nobutaka SASAKI, Gyeong min PARK | 2024-12-10 |
| 12131937 | Transfer system, transfer device, and transfer method | Toshiaki TOYOMAKI, Masatomo KITA | 2024-10-29 |
| 12125738 | Storage module, substrate processing system, and method of transferring consumable member | Masatomo KITA | 2024-10-22 |
| 12046454 | Performance calculation method and processing apparatus | Atsushi Sawachi | 2024-07-23 |
| 12040202 | Processing system | Jun Hirose | 2024-07-16 |
| 11994234 | Gate valve and driving method | Masatomo KITA | 2024-05-28 |
| 11955356 | Processing system and transfer method | Masatomo KITA | 2024-04-09 |
| 11862506 | Substrate processing system, vacuum substrate transfer module, and substrate transfer method | Masatomo KITA | 2024-01-02 |