Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12165854 | Substrate support and substrate processing apparatus | Shin Matsuura, Gyeong min PARK, Toshiki AKAMA | 2024-12-10 |
| 12165893 | Substrate processing system and transfer method | Norihiko Amikura, Masatomo KITA, Toshiyuki MAKABE, Shin Matsuura, Gyeong min PARK | 2024-12-10 |
| 12027346 | Substrate processing apparatus and method of driving relay member | Shin Matsuura | 2024-07-02 |