Issued Patents 2024
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12165893 | Substrate processing system and transfer method | Norihiko Amikura, Toshiyuki MAKABE, Shin Matsuura, Nobutaka SASAKI, Gyeong min PARK | 2024-12-10 |
| 12131937 | Transfer system, transfer device, and transfer method | Norihiko Amikura, Toshiaki TOYOMAKI | 2024-10-29 |
| 12125738 | Storage module, substrate processing system, and method of transferring consumable member | Norihiko Amikura | 2024-10-22 |
| 12080572 | Substrate processing apparatus | Masahiro DOGOME | 2024-09-03 |
| 11994234 | Gate valve and driving method | Norihiko Amikura | 2024-05-28 |
| 11955356 | Processing system and transfer method | Norihiko Amikura | 2024-04-09 |
| 11948816 | Transfer apparatus | Masahiro DOGOME | 2024-04-02 |
| 11862506 | Substrate processing system, vacuum substrate transfer module, and substrate transfer method | Norihiko Amikura | 2024-01-02 |