Issued Patents 2024
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12165854 | Substrate support and substrate processing apparatus | Nobutaka SASAKI, Gyeong min PARK, Toshiki AKAMA | 2024-12-10 |
| 12165893 | Substrate processing system and transfer method | Norihiko Amikura, Masatomo KITA, Toshiyuki MAKABE, Nobutaka SASAKI, Gyeong min PARK | 2024-12-10 |
| 12068139 | Plasma processing apparatus | Jun Hirose | 2024-08-20 |
| 12027346 | Substrate processing apparatus and method of driving relay member | Nobutaka SASAKI | 2024-07-02 |
| 11901163 | Plasma processing system and edge ring replacement method | Kenichi Kato | 2024-02-13 |