Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12068139 | Plasma processing apparatus | Shin Matsuura | 2024-08-20 |
| 12040166 | Substrate processing apparatus, substrate processing system, and maintenance method | Atsushi Sawachi, Takuya Nishijima, Ichiro SONE, Suguru Sato | 2024-07-16 |
| 12040202 | Processing system | Norihiko Amikura | 2024-07-16 |