Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12040166 | Substrate processing apparatus, substrate processing system, and maintenance method | Atsushi Sawachi, Jun Hirose, Takuya Nishijima, Suguru Sato | 2024-07-16 |
| 12002666 | Measuring device, measuring method, and vacuum processing apparatus | Atsushi Sawachi, Takuya Nishijima, Suguru Sato | 2024-06-04 |
| 11992912 | Part replacement system and part replacement device | Atsushi Sawachi, Suguru Sato, Takuya Nishijima | 2024-05-28 |