Issued Patents 2024
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12170187 | Gas supply system, plasma processing apparatus, and gas supply method | — | 2024-12-17 |
| 12046454 | Performance calculation method and processing apparatus | Norihiko Amikura | 2024-07-23 |
| 12040166 | Substrate processing apparatus, substrate processing system, and maintenance method | Jun Hirose, Takuya Nishijima, Ichiro SONE, Suguru Sato | 2024-07-16 |
| 12033834 | Flow rate controller, gas supply system, and flow rate control method | — | 2024-07-09 |
| 12002666 | Measuring device, measuring method, and vacuum processing apparatus | Ichiro SONE, Takuya Nishijima, Suguru Sato | 2024-06-04 |
| 11992912 | Part replacement system and part replacement device | Ichiro SONE, Suguru Sato, Takuya Nishijima | 2024-05-28 |