Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12165854 | Substrate support and substrate processing apparatus | Nobutaka SASAKI, Shin Matsuura, Toshiki AKAMA | 2024-12-10 |
| 12165893 | Substrate processing system and transfer method | Norihiko Amikura, Masatomo KITA, Toshiyuki MAKABE, Shin Matsuura, Nobutaka SASAKI | 2024-12-10 |
| 12105964 | Storage device and method of operating the same | Jong Tack Jung | 2024-10-01 |