Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12080572 | Substrate processing apparatus | Masatomo KITA | 2024-09-03 |
| 11969879 | Substrate accommodating device and processing system | — | 2024-04-30 |
| 11972933 | Plasma processing apparatus and substrate support of plasma processing apparatus | — | 2024-04-30 |
| 11948816 | Transfer apparatus | Masatomo KITA | 2024-04-02 |