Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12185631 | Pizoelectric MEMS device with electrodes having low surface roughness | Yi-Ren Wang, Yuan-Chih Hsieh | 2024-12-31 |
| 12139399 | Conductive bond structure to increase membrane sensitivity in MEMS device | Chia-Ming Hung, Xin-Hua Huang, Yuan-Chih Hsieh | 2024-11-12 |
| 12134824 | Undercut-free patterned aluminum nitride structure and methods for forming the same | Yuan-Chih Hsieh, Yi-Ren Wang | 2024-11-05 |
| 11932534 | MEMS device having a metallization structure embedded in a dielectric structure with laterally offset sidewalls of a first portion and a second portion | Chang-Ming Wu, Chung-Yi Yu, Ping-Yin Liu, Jung-Huei Peng | 2024-03-19 |