Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12114576 | Method for forming a hard mask with a tapered profile | Min-Yung Ko, Chern-Yow Hsu, Shih-Chang Liu | 2024-10-08 |
| 12043537 | Method of manufacturing a microelectromechanical systems (MEMS) device | Shih-Wei Lin, Ting-Jung Chen | 2024-07-23 |
| 12027350 | Process and related device for removing by-product on semiconductor processing chamber sidewalls | Jing Liao, Lee-Chuan Tseng | 2024-07-02 |
| 11932534 | MEMS device having a metallization structure embedded in a dielectric structure with laterally offset sidewalls of a first portion and a second portion | Hung-Hua Lin, Chung-Yi Yu, Ping-Yin Liu, Jung-Huei Peng | 2024-03-19 |