Issued Patents 2024
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12180064 | Curved cantilever design to reduce stress in MEMS actuator | — | 2024-12-31 |
| 12133467 | Microelectromechanical system with piezoelectric film and manufacturing method thereof | — | 2024-10-29 |
| 12043537 | Method of manufacturing a microelectromechanical systems (MEMS) device | Shih-Wei Lin, Chang-Ming Wu | 2024-07-23 |
| 12006208 | Micro-electromechanical system device including a precision proof mass element and methods for forming the same | Shih-Wei Lin | 2024-06-11 |
| 11932531 | Curved cantilever design to reduce stress in MEMS actuator | — | 2024-03-19 |