Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12185631 | Pizoelectric MEMS device with electrodes having low surface roughness | Yi-Ren Wang, Hung-Hua Lin | 2024-12-31 |
| 12151932 | Microelectromechanical systems device having a mechanically robust anti-stiction/outgassing structure | Kuei-Sung Chang, Chun-Wen Cheng, Fei-Lung Lai, Shing-Chyang Pan, Yi-Ren Wang | 2024-11-26 |
| 12139399 | Conductive bond structure to increase membrane sensitivity in MEMS device | Hung-Hua Lin, Chia-Ming Hung, Xin-Hua Huang | 2024-11-12 |
| 12134824 | Undercut-free patterned aluminum nitride structure and methods for forming the same | Yi-Ren Wang, Hung-Hua Lin | 2024-11-05 |