Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12185631 | Pizoelectric MEMS device with electrodes having low surface roughness | Hung-Hua Lin, Yuan-Chih Hsieh | 2024-12-31 |
| 12151932 | Microelectromechanical systems device having a mechanically robust anti-stiction/outgassing structure | Kuei-Sung Chang, Chun-Wen Cheng, Fei-Lung Lai, Shing-Chyang Pan, Yuan-Chih Hsieh | 2024-11-26 |
| 12134824 | Undercut-free patterned aluminum nitride structure and methods for forming the same | Yuan-Chih Hsieh, Hung-Hua Lin | 2024-11-05 |