Issued Patents 2024
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12094708 | Method of processing substrate, substrate processing apparatus, recording medium, and method of manufacturing semiconductor device | Masaya NAGATO | 2024-09-17 |
| 12033852 | Method of processing substrate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takayuki Waseda, Takashi Nakagawa, Kimihiko NAKATANI, Motomu DEGAI | 2024-07-09 |
| 12009201 | Method of processing substrate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Katsuyoshi Harada, Tatsuru Matsuoka | 2024-06-11 |
| 11978623 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Katsuyoshi Harada, Kimihiko NAKATANI, Yoshiro Hirose, Masaya NAGATO, Takashi Ozaki +1 more | 2024-05-07 |
| 11967499 | Method of processing substrate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Tatsuru Matsuoka | 2024-04-23 |
| 11961733 | Method of manufacturing semiconductor device, substrate processing method, substrate processing apparatus, and recording medium | Tomiyuki SHIMIZU, Masaya NAGATO, Takashi Ozaki, Katsuyoshi Harada | 2024-04-16 |
| 11935742 | Method of processing substrate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Kimihiko NAKATANI, Takayuki Waseda | 2024-03-19 |
| 11894239 | Method of processing substrate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Motomu DEGAI, Kimihiko NAKATANI, Takashi Nakagawa, Takayuki Waseda | 2024-02-06 |