Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12033852 | Method of processing substrate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takashi Nakagawa, Kimihiko NAKATANI, Motomu DEGAI, Yoshitomo HASHIMOTO | 2024-07-09 |
| 11935742 | Method of processing substrate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshitomo HASHIMOTO, Kimihiko NAKATANI | 2024-03-19 |
| 11923191 | Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus, and recording medium | Shoma Miyata, Kimihiko NAKATANI, Takashi Nakagawa, Motomu DEGAI | 2024-03-05 |
| 11894239 | Method of processing substrate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Motomu DEGAI, Kimihiko NAKATANI, Takashi Nakagawa, Yoshitomo HASHIMOTO | 2024-02-06 |