Issued Patents 2024
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12176216 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Kimihiko NAKATANI, Hiroshi Ashihara | 2024-12-24 |
| 12033852 | Method of processing substrate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takayuki Waseda, Takashi Nakagawa, Kimihiko NAKATANI, Yoshitomo HASHIMOTO | 2024-07-09 |
| 11923191 | Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus, and recording medium | Shoma Miyata, Kimihiko NAKATANI, Takayuki Waseda, Takashi Nakagawa | 2024-03-05 |
| 11923193 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Kimihiko NAKATANI | 2024-03-05 |
| 11894239 | Method of processing substrate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Kimihiko NAKATANI, Takashi Nakagawa, Takayuki Waseda, Yoshitomo HASHIMOTO | 2024-02-06 |