Issued Patents 2024
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12176216 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Motomu DEGAI, Hiroshi Ashihara | 2024-12-24 |
| 12080550 | Method of manufacturing semiconductor device, substrate processing method, substrate processing apparatus, and recording medium | — | 2024-09-03 |
| 12080546 | Method of processing substrate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | — | 2024-09-03 |
| 12033852 | Method of processing substrate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takayuki Waseda, Takashi Nakagawa, Motomu DEGAI, Yoshitomo HASHIMOTO | 2024-07-09 |
| 11978623 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshitomo HASHIMOTO, Katsuyoshi Harada, Yoshiro Hirose, Masaya NAGATO, Takashi Ozaki +1 more | 2024-05-07 |
| 11935742 | Method of processing substrate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshitomo HASHIMOTO, Takayuki Waseda | 2024-03-19 |
| 11923193 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Motomu DEGAI | 2024-03-05 |
| 11923191 | Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus, and recording medium | Shoma Miyata, Takayuki Waseda, Takashi Nakagawa, Motomu DEGAI | 2024-03-05 |
| 11894239 | Method of processing substrate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Motomu DEGAI, Takashi Nakagawa, Takayuki Waseda, Yoshitomo HASHIMOTO | 2024-02-06 |