Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12176216 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Motomu DEGAI, Kimihiko NAKATANI | 2024-12-24 |
| 11996311 | Substrate processing apparatus, method of processing substrate, method of manufacturing semiconductor device, and recording medium | Yuji Takebayashi | 2024-05-28 |