Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11996311 | Substrate processing apparatus, method of processing substrate, method of manufacturing semiconductor device, and recording medium | Hiroshi Ashihara | 2024-05-28 |
| 11869790 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Toshiro Koshimaki | 2024-01-09 |