Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12094708 | Method of processing substrate, substrate processing apparatus, recording medium, and method of manufacturing semiconductor device | Yoshitomo HASHIMOTO | 2024-09-17 |
| 11978623 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshitomo HASHIMOTO, Katsuyoshi Harada, Kimihiko NAKATANI, Yoshiro Hirose, Takashi Ozaki +1 more | 2024-05-07 |
| 11961733 | Method of manufacturing semiconductor device, substrate processing method, substrate processing apparatus, and recording medium | Tomiyuki SHIMIZU, Takashi Ozaki, Yoshitomo HASHIMOTO, Katsuyoshi Harada | 2024-04-16 |