Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11978623 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshitomo HASHIMOTO, Katsuyoshi Harada, Kimihiko NAKATANI, Yoshiro Hirose, Masaya NAGATO +1 more | 2024-05-07 |
| 11961733 | Method of manufacturing semiconductor device, substrate processing method, substrate processing apparatus, and recording medium | Tomiyuki SHIMIZU, Masaya NAGATO, Yoshitomo HASHIMOTO, Katsuyoshi Harada | 2024-04-16 |