Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12009201 | Method of processing substrate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Katsuyoshi Harada, Yoshitomo HASHIMOTO | 2024-06-11 |
| 11967499 | Method of processing substrate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yoshitomo HASHIMOTO | 2024-04-23 |