Issued Patents 2024
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12098914 | Surface roughness and emissivity determination | Eric Ng, Mehdi Vaez-Iravani | 2024-09-24 |
| 12062583 | Optical metrology models for in-line film thickness measurements | Eric Ng, Edward W. Budiarto, Sergey Starik | 2024-08-13 |
| 12002665 | Real-time detection of particulate matter during deposition chamber manufacturing | Mehdi Vaez-Iravani, Kyle Tantiwong | 2024-06-04 |
| 11927535 | Metrology for OLED manufacturing using photoluminescence spectroscopy | Avishek Ghosh, Byung Sung Kwak, Robert Jan Visser, Gangadhar Banappanavar, Dinesh Kabra | 2024-03-12 |
| 11908716 | Image-based in-situ process monitoring | Guoheng Zhao, Venkatakaushik Voleti, Kyle Tantiwong, Andreas Schulze, Niranjan Ramchandra Khasgiwale +1 more | 2024-02-20 |
| 11898249 | PECVD process | Nagarajan Rajagopalan, Xinhai Han, Michael Wenyoung Tsiang, Masaki Ogata, Zhijun Jiang +17 more | 2024-02-13 |
| 11901203 | Substrate process endpoint detection using machine learning | Pengyu Han, Lei Lian, Shu-Yu Chen, Wan Hsueh Lai, Chao-Hsien Lee +3 more | 2024-02-13 |