Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12098914 | Surface roughness and emissivity determination | Eric Ng, Todd Egan | 2024-09-24 |
| 12002665 | Real-time detection of particulate matter during deposition chamber manufacturing | Todd Egan, Kyle Tantiwong | 2024-06-04 |
| 11908716 | Image-based in-situ process monitoring | Guoheng Zhao, Venkatakaushik Voleti, Todd Egan, Kyle Tantiwong, Andreas Schulze +1 more | 2024-02-20 |