Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12002665 | Real-time detection of particulate matter during deposition chamber manufacturing | Mehdi Vaez-Iravani, Todd Egan | 2024-06-04 |
| 11908716 | Image-based in-situ process monitoring | Guoheng Zhao, Venkatakaushik Voleti, Todd Egan, Andreas Schulze, Niranjan Ramchandra Khasgiwale +1 more | 2024-02-20 |