Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12033835 | Modular microwave source with multiple metal housings | Philip Allan Kraus, James D. Carducci, Richard Fovell, Sathya Swaroop Ganta, Karthikeyan Balaraman +1 more | 2024-07-09 |
| 11899366 | Method and apparatus for post exposure processing of photoresist wafers | Viachslav Babayan, Douglas A. Buchberger, Jr., Qiwei Liang, Ludovic Godet, Srinivas D. Nemani +2 more | 2024-02-13 |